Title:
【発明の名称】マルチターボ型真空ポンプ
Document Type and Number:
Japanese Patent JP2865888
Kind Code:
B2
Inventors:
ABE TETSUYA
MURAKAMI YOSHIO
ARAI TAKASHI
OOSAWA HARUSHIGE
HATA SATOSHI
MURAKAMI YOSHIO
ARAI TAKASHI
OOSAWA HARUSHIGE
HATA SATOSHI
Application Number:
JP3854491A
Publication Date:
March 08, 1999
Filing Date:
March 05, 1991
Export Citation:
Assignee:
NIPPON GENSHIRYOKU KENKYUSHO
MITSUBISHI JUKOGYO KK
MITSUBISHI JUKOGYO KK
International Classes:
F04D17/16; F04D19/04; F04D25/16; (IPC1-7): F04D19/04
Domestic Patent References:
| JP1277698A | ||||
| JP6375390A |
Attorney, Agent or Firm:
Akasaka Saka (1 person outside)