Title:
【発明の名称】マルチパス分光計
Document Type and Number:
Japanese Patent JP3135530
Kind Code:
B2
Abstract:
A multi-pass spectrometer. Light from a source is expanded and collimated with a collimating optic into a collimated beam. The collimated beam illuminates a dispersing optic such as a grating from which light is reflected back toward the collimating optic. A transmitting-reflecting optic is positioned across the collimated beam to cause at least two reflections of at least a portion of the collimated beam from the dispersing optic. A photometer measures the double dispersed beam at a range of spacial locations in order to determine spectral characteristics of the light from the light source. In a preferred embodiment, a partially reflecting mirror is positioned between the grating and a collimated optic. This mirror is positioned at an angle slightly different from 90 degrees so that a portion of the light reflected from the dispersing optic is reflected back toward the dispersing optic at a slightly different range of angles. A portion of this second reflected beam is dispersed again and reflected at a different range of angles by the dispersing optic. A portion of this second reflected beam transmits the partially reflecting mirror and may be focused, and the intensity of the light at spatially distinct positions are measured by a photometer to access spectral characteristics of the light source. In a second preferred embodiment, the light from a third reflected beam is measured.
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Inventors:
Alexander A. Ersov
Application Number:
JP23770298A
Publication Date:
February 19, 2001
Filing Date:
August 24, 1998
Export Citation:
Assignee:
Cymer Incorporated
International Classes:
G01J3/22; G01J3/18; (IPC1-7): G01J3/22
Domestic Patent References:
| JP10307203A | ||||
| JP9184760A | ||||
| JP1197617A | ||||
| JP34130A | ||||
| JP62195750U |
Other References:
【文献】国際公開99/13543(WO,A1)
Attorney, Agent or Firm:
Minoru Nakamura (6 outside)