Title:
【発明の名称】オイルレス差圧センサ
Document Type and Number:
Japanese Patent JP2003522942
Kind Code:
A
Abstract:
A pressure sensor is provided for measuring a pressure difference between two fluids which does not require isolation fluid. The pressure sensor includes a diaphragm support member having an outer periphery and diaphragms coupled thereto. Movement of the diaphragms are the movement of a moveable member. The movement can be sensed to determine the applied differential pressure. The coupling member is joined to the outer periphery with a web. The web is recessed from opposed outwardly facing surfaces of the outer periphery, and first and second diaphragms disposed on opposite sides of the diaphragm support member. Each diaphragm is joined to the outer periphery and to the coupling member.
Inventors:
Wilcox, Charles, Earl.
Lutz, Mark, A.
Lomo, Mark, Gee.
Rad, Stanley, E. Jr.
Lutz, Mark, A.
Lomo, Mark, Gee.
Rad, Stanley, E. Jr.
Application Number:
JP2001558702A
Publication Date:
July 29, 2003
Filing Date:
February 09, 2001
Export Citation:
Assignee:
Rosemount Incorporated
International Classes:
G01L9/00; G01L13/06; G01L11/02; G01L13/02; G01M11/02; (IPC1-7): G01L13/06
Attorney, Agent or Firm:
Kazuki Tanaka (2 outside)