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Title:
【発明の名称】光センサ多点測定装置
Document Type and Number:
Japanese Patent JP2644869
Kind Code:
B2
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Inventors:
KINOSHITA KAZUTO
MORI SADAO
Application Number:
JP975489A
Publication Date:
August 25, 1997
Filing Date:
January 20, 1989
Export Citation:
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Assignee:
HITACHI SEISAKUSHO KK
International Classes:
G01D5/353; G01D5/26; G01D21/00; G01K11/12; G01L1/24; G02B6/26; G08C15/00; G08C23/00; G08C23/04; (IPC1-7): G08C23/04; G01D5/26; G01D21/00; G02B6/26; G08C15/00
Domestic Patent References:
JP63269075A
Attorney, Agent or Firm:
Katsuo Ogawa (1 person outside)



 
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