Title:
【発明の名称】有機金属化合物
Document Type and Number:
Japanese Patent JP2688965
Kind Code:
B2
Abstract:
PCT No. PCT/EP88/00674 Sec. 371 Date Apr. 7, 1989 Sec. 102(e) Date Apr. 7, 1989 PCT Filed Jul. 26, 1988 PCT Pub. No. WO89/01479 PCT Pub. Date Feb. 23, 1989.The invention relates to organometallic compounds which are stabilized intramolecularly and have a cyclic or bicyclic structure and to the use thereof for the preparation of thin films and epitaxial layers by gas phase deposition.
Inventors:
Hostalek, Martin
Paul, Ludwitzhi
Eltmann, Dietrich
Sheumann, Herbert
Hartmann, Uve
Haien, Mino
Jurgensen, Hallger
Paul, Ludwitzhi
Eltmann, Dietrich
Sheumann, Herbert
Hartmann, Uve
Haien, Mino
Jurgensen, Hallger
Application Number:
JP50705088A
Publication Date:
December 10, 1997
Filing Date:
July 26, 1988
Export Citation:
Assignee:
Merck Patent GmbH
International Classes:
C07F5/00; C07F5/06; C23C16/18; C30B29/40; C23C16/20; (IPC1-7): C07F5/00; C23C16/18; C30B29/40
Attorney, Agent or Firm:
Kiyokazu Kazuwa (1 person outside)