Title:
【発明の名称】感光性樹脂組成物
Document Type and Number:
Japanese Patent JP2622267
Kind Code:
B2
Abstract:
A photosensitive resin composition comprising (A) an alkaline aqueous solution-soluble novolak resin, (B) a photosensitizer obtained by reacting a polyhydroxy compound with 1,2-naphthoquinone-(2)-diazido-5(or 4)-sulfonyl chloride, and (C) an ultraviolet absorber such as 2-(2 min -hydroxy-5 min -methylphenyl)-benzotriazole, has a strong absorption against a light of a wavelength of 365 nm and is suitable for producing semiconductor elements, etc.
Inventors:
Shigeru Koibuchi
Asabu Isobe
Hashimoto
Asabu Isobe
Hashimoto
Application Number:
JP6846588A
Publication Date:
June 18, 1997
Filing Date:
March 23, 1988
Export Citation:
Assignee:
日立化成工業株式会社
株式会社日立製作所
株式会社日立製作所
International Classes:
G03C1/72; G03F7/004; G03F7/022; G03C1/00; H01L21/027; (IPC1-7): G03F7/022; G03F7/004; H01L21/027
Domestic Patent References:
| JP59214847A | ||||
| JP6267531A | ||||
| JP57155534A | ||||
| JP62262043A | ||||
| JP6145240A |
Attorney, Agent or Firm:
Kunihiko Wakabayashi