Title:
【発明の名称】感光装置及びその作製方法
Document Type and Number:
Japanese Patent JP2838318
Kind Code:
B2
Abstract:
A device for reading an image (an image reading device) according to this invention comprises therein at least one photoelectric conversion semiconductor device provided on a substrate and at least one thin film transistor circuit element provided on the substrate wherein said photoelectric conversion semiconductor device and said thin film transistor circuit element comprise semiconductor regions obtained from one semiconductor film provided on said substrate. The device for reading an image is produced by a process comprising the steps of: depositing a semiconductor material on a substrate; forming a photoelectric conversion semiconductor device on said substrate, a semiconductor region of said photoelectric conversion semiconductor device being made of said semiconductor material; and forming a thin film transistor on said substrate, a semiconductor region of said thin film transistor being made of said semiconductor material, wherein said thin film transistor constitutes an electric circuit required to read an image.
Inventors:
YAMAZAKI SHUNPEI
Application Number:
JP33905590A
Publication Date:
December 16, 1998
Filing Date:
November 30, 1990
Export Citation:
Assignee:
HANDOTAI ENERUGII KENKYUSHO KK
International Classes:
H01L21/8238; H01L27/092; H01L27/12; H01L27/146; H01L29/78; H01L29/786; H01L31/10; (IPC1-7): H01L27/146
Domestic Patent References:
| JP2143572A | ||||
| JP6042877A | ||||
| JP6484663A | ||||
| JP5778185A | ||||
| JP5827364A | ||||
| JP62209850A |