Title:
【発明の名称】ピラニ真空計
Document Type and Number:
Japanese Patent JPS5815050
Kind Code:
B2
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Inventors:
SAKAMOTO MASAHIRO
Application Number:
JP15375578A
Publication Date:
March 23, 1983
Filing Date:
December 14, 1978
Export Citation:
Assignee:
MITSUBISHI KEIKINZOKU KOGYO
International Classes:
G01L21/12; G01D3/028; (IPC1-7): G01L21/12
Attorney, Agent or Firm:
Masataka Kobayashi