Title:
【発明の名称】プレーナ型半導体装置及びその製造方法
Document Type and Number:
Japanese Patent JP3117023
Kind Code:
B2
Inventors:
Katsunori Ueno
Application Number:
JP10157191A
Publication Date:
December 11, 2000
Filing Date:
May 07, 1991
Export Citation:
Assignee:
Fuji Electric Co., Ltd.
International Classes:
H01L29/78; H01L29/06; H01L29/40; H01L29/8605; (IPC1-7): H01L29/78
Domestic Patent References:
| JP1266758A | ||||
| JP62239561A | ||||
| JP2296363A |
Attorney, Agent or Firm:
Masaharu Shinobe