Title:
【発明の名称】プラズマX線源
Document Type and Number:
Japanese Patent JP2533502
Kind Code:
B2
Inventors:
KUROSAWA YUKIO
ARITA HIROSHI
SUZUKI KOJI
HIRASAWA KUNIO
ARITA HIROSHI
SUZUKI KOJI
HIRASAWA KUNIO
Application Number:
JP23116886A
Publication Date:
September 11, 1996
Filing Date:
October 01, 1986
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H05G2/00; G03F7/20; H01J35/22; H01L21/027; H01L21/30; H05G1/00; (IPC1-7): H05G1/00; H05G2/00
Domestic Patent References:
| JP61111000A | ||||
| JP56117340U |
Attorney, Agent or Firm:
Katsuo Ogawa (1 person outside)