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Title:
【発明の名称】プラズマ表面処理法
Document Type and Number:
Japanese Patent JP2749630
Kind Code:
B2
More Like This:
JP6293768How to thermochemically process a part while covering a part, and the corresponding mask
JPH02213459METHOD FOR PLASMA CARBURIZATION
Inventors:
OKAZAKI SACHIKO
KOKOMA MASUHIRO
KIMOTO TSUNENOBU
TOMIKAWA TADASHI
FUJITA NOBUHIKO
NAKAGAMA SHOJI
Application Number:
JP10400289A
Publication Date:
May 13, 1998
Filing Date:
April 24, 1989
Export Citation:
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Assignee:
SUMITOMO DENKI KOGYO KK
OKAZAKI SACHIKO
KOKOMA MASUHIRO
International Classes:
C23C8/36; H01L21/31; H01L21/316; H01L21/318; (IPC1-7): H01L21/316; C23C8/36; H01L21/318
Domestic Patent References:
JP6350478A
Other References:
応用物理 Ｖｏｌ．５５ Ｎｏ：３（１９８６）Ｐ．２１９−２２０
Attorney, Agent or Firm:
Shigeki Kawase



 
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