Title:
【発明の名称】研磨装置および方法
Document Type and Number:
Japanese Patent JP2002535151
Kind Code:
A
Abstract:
A machine for abrading or polishing a workpiece (5) comprises a holding surface (4) holding the workpiece (5), a head member (7) arranged along a rotation axis (h) to rotate about the rotation axis (h), a working member (8) having a surface for abrading or polishing the workpiece (5) arranged on the head member (7) on the rotational axis for rotation about the rotation axis (h) with the head member, a first driving arrangement for driving a head member (7) and the working member (8) mounted thereon to rotate about the rotation axis, a head mounting arrangement for mounting the head member (7), a second driving arrangement (700-800) for driving the head mounting arrangement to incline the rotation axis of the head member (7) relative to a precession axis intersecting the rotation axis, and for moving the head member (7) to inclined positions with the rotation axis precessed about the precession axis, and a third driving arrangement for relatively moving the head mounting arrangement across the holding surface.
Inventors:
Richard Bingham
David charles relay
David charles relay
Application Number:
JP2000585029A
Publication Date:
October 22, 2002
Filing Date:
December 01, 1999
Export Citation:
Assignee:
University College London
International Classes:
G02B3/00; B24B1/00; B24B7/22; B24B7/24; B24B13/00; B24B13/01; B24B13/015; B24B13/02; B24B17/10; B24B29/00; B24B37/04; B24B41/00; B24B41/04; B24B47/12; B24B51/00; B24D3/06; B24D3/28; B24D3/34; B24D9/04; B24D11/00; B24D13/14; B24D13/20; B24D18/00; (IPC1-7): B24B41/04; B24B13/01; G02B3/00
Attorney, Agent or Firm:
Furuya Eiko (2 outside)