Title:
【発明の名称】研磨装置
Document Type and Number:
Japanese Patent JP2555373
Kind Code:
B2
Inventors:
NAGASE NOBORU
YAMAGUCHI MASAO
MATSUNAMI KOJI
YAMAGUCHI MASAO
MATSUNAMI KOJI
Application Number:
JP24343487A
Publication Date:
November 20, 1996
Filing Date:
September 28, 1987
Export Citation:
Assignee:
NAGASE INTEGURETSUKUSU KK
International Classes:
B24B7/06; B24B1/00; B24B7/00; B24B17/10; B24B27/00; B24B51/00; (IPC1-7): B24B27/00; B24B1/00; B24B7/00; B24B17/10
Domestic Patent References:
| JP60131158A | ||||
| JP5862099A |
Attorney, Agent or Firm:
Hironobu Onda