Title:
MAGNETIC LEVITATION VACUUM CONVEYER
Document Type and Number:
Japanese Patent JPH0664748
Kind Code:
A
Abstract:
PURPOSE: To provide magnetic levitation vacuum conveyer wherein a conveyed object of wafer or the like conveyed in a vacuum can be prevented from being contaminated by dropping down particles.
CONSTITUTION: In a magnetic levitation vacuum conveyer of comprising a vacuum tunnel 1 formed of a partition 2 to hold the inside in a vacuum condition, conveying base 3 arranged in the vacuum tunnel 1, plurality of levitating electromagnets 4 for supporting the conveying base 3 levitated in a noncontact condition and a linear motor 6 for moving the conveying base 3 to run, a dustproof part 12 for covering a conveyed object is provided in the conveying base 3.
Inventors:
SHINOZUKA SHUHEI
ONO KOJI
MATSUMURA MASAO
ONO KOJI
MATSUMURA MASAO
Application Number:
JP23782792A
Publication Date:
March 08, 1994
Filing Date:
August 13, 1992
Export Citation:
Assignee:
EBARA CORP
International Classes:
B65G54/02; H01L21/677; H01L21/68; (IPC1-7): B65G54/02; H01L21/68
Attorney, Agent or Firm:
Isamu Watanabe (1 person outside)
Next Patent: PLATE COLLECTING DEVICE