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Title:
SEMICONDUCTOR WAFER HEATING DEVICE
Document Type and Number:
Japanese Patent JPH0653145
Kind Code:
A
Abstract:

PURPOSE: To provide a wafer heater having a hot surface kept at uniform temperature.

CONSTITUTION: A ceramic heater 2 with a hot surface 2a is composed of a ceramic disc 6 having an embedded resistance heater 7. The ceramic disc 6 is enclosed at all sides, except the hot surface, by reflectors 5 that has a specific distribution of heat absorption.


Inventors:
MURASATO MASAHIRO
USHIGOE RYUSUKE
NOBORI KAZUHIRO
Application Number:
JP20107592A
Publication Date:
February 25, 1994
Filing Date:
July 28, 1992
Export Citation:
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Assignee:
NGK INSULATORS LTD
International Classes:
H01L21/205; H05B3/14; (IPC1-7): H01L21/205; H05B3/14
Domestic Patent References:
JPH02238619A1990-09-20
JPH01153634U1989-10-23
JPH04181724A1992-06-29
Attorney, Agent or Firm:
Akihide Sugimura (5 outside)



 
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