Title:
【発明の名称】精密3次元形状測定装置
Document Type and Number:
Japanese Patent JP2824463
Kind Code:
B2
Inventors:
Chika Miyata
Masatoshi Yasutake
Hiroshi Ishijima
Masatoshi Yasutake
Hiroshi Ishijima
Application Number:
JP21749188A
Publication Date:
November 11, 1998
Filing Date:
August 31, 1988
Export Citation:
Assignee:
Seiko Instruments Co., Ltd.
International Classes:
G01B7/34; G01N23/00; G01N37/00; G01Q10/02; G01Q10/04; G01Q30/02; G01Q60/10; G01Q90/00; G02B21/00; H01J37/28; (IPC1-7): G01N37/00; G01B7/34
Domestic Patent References:
| JP63153405A | ||||
| JP63298951A | ||||
| JP6479603A |
Attorney, Agent or Firm:
Keinosuke Hayashi