Title:
【発明の名称】ダイアフラムのプリロード静圧ベアリング
Document Type and Number:
Japanese Patent JP2002535578
Kind Code:
A
Abstract:
A preload hydrostatic bearing includes a pad, a diaphragm and an adjustable member. The pad has a bearing structure, an inlet manifold, and a plurality of orifices. The orifices direct a fluid, such as air, from the inlet manifold toward the bearing surface. The diaphragm is mounted on the pad, and the adjustable member, which extends in an axial direction, is coupled proximate one end to a center portion of the diaphragm. The diaphragm transfers a preload in the axial direction to the adjustable member. This preload hydrostatic bearing has a high repeatability of performance, because a single diaphragm replaces prior art mechanical coupling devices, such as ball bearings, conical seats and spring washers, which undesirably are sources of friction and hysteresis.
Inventors:
Hipol, Philip, Jay.
Hill, David, Earl.
Hill, David, Earl.
Application Number:
JP2000596279A
Publication Date:
October 22, 2002
Filing Date:
February 01, 2000
Export Citation:
Assignee:
Etec Systems, Inc.
International Classes:
B23Q1/01; B23Q1/38; B23Q1/26; B23Q1/58; F16C29/00; F16C29/02; F16C32/06; (IPC1-7): F16C32/06; B23Q1/38
Attorney, Agent or Firm:
Yoshiki Hasegawa (1 person outside)