Title:
【発明の名称】圧力測定装置
Document Type and Number:
Japanese Patent JP2852602
Kind Code:
B2
Abstract:
A seal diaphragm structure for a pressure measuring device includes a seal diaphragm, an insulating film, and an p-type semiconductor film. The seal diaphragm has a first surface opposing a target fluid and a second surface contacting a pressure transfer sealed liquid sealed in the pressure measuring device. The insulating film is formed on the first surface of the seal diaphragm. The p-type semiconductor film is formed on the insulating film.
Inventors:
SUZUKI MOTOO
Application Number:
JP7126894A
Publication Date:
February 03, 1999
Filing Date:
March 17, 1994
Export Citation:
Assignee:
YAMATAKE KK
International Classes:
G01L13/02; G01L7/08; G01L9/00; G01L13/06; (IPC1-7): G01L13/06
Attorney, Agent or Firm:
Masaki Yamakawa