Title:
【発明の名称】油回転真空ポンプの圧力異常検出装置
Document Type and Number:
Japanese Patent JP3347209
Kind Code:
B2
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Inventors:
Hisashi Yamamoto
Katsuyuki Noguchi
Katsuyuki Noguchi
Application Number:
JP3282794A
Publication Date:
November 20, 2002
Filing Date:
February 04, 1994
Export Citation:
Assignee:
ANELVA Co., Ltd.
NEC
NEC
International Classes:
F04C25/02; F04C27/02; F04C28/28; (IPC1-7): F04C25/02; F04C29/10
Domestic Patent References:
| JP4128588A | ||||
| JP4140494A | ||||
| JP4140493A | ||||
| JP6051511A | ||||
| JP6220117B1 | ||||
| JP21513Y2 | ||||
| JP6327106Y2 |
Attorney, Agent or Firm:
Hirotoshi Tamiya