Title:
【発明の名称】圧力センサー
Document Type and Number:
Japanese Patent JP3316065
Kind Code:
B2
Inventors:
Kunio Ishida
Satoshi Ito
Satoshi Ito
Application Number:
JP31209593A
Publication Date:
August 19, 2002
Filing Date:
December 13, 1993
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
G01L11/00; G01L11/02; G01N21/27; H01L29/84; (IPC1-7): G01L11/02; G01N21/27
Domestic Patent References:
| JP5231964A |
Attorney, Agent or Firm:
Hidekazu Miyoshi (3 outside)