Title:
【発明の名称】圧力センサ
Document Type and Number:
Japanese Patent JPH05264391
Kind Code:
A
Abstract:
PURPOSE:To obtain a pressure sensor capable of outputting a stable pressure detection signal independent of the temperature of its piezoelectric body. CONSTITUTION:Dielectric 21 composed of strontium titanate is positioned between a piezoelectric body 21 and an upper plate 22 in a large diameter cylindrical part 12A of a casing body 12. When the capacitance of the piezoelectric body 20 changes in accordance with temperature change, the capacitance of the dielectric 21 changes inversely with the capacitance of the piezoelectric body 20. Accordingly, the dielectric 21 serves to compensate for the changes in capacitance of the two piezoelectric bodies.
Inventors:
Shigeo Okuma
Application Number:
JP9343092A
Publication Date:
October 12, 1993
Filing Date:
March 19, 1992
Export Citation:
Assignee:
Nippon Electronics Co., Ltd.
International Classes:
G01L9/08; G01D3/036; G01D5/24; G01L9/00; G01L19/00; G01L23/10; (IPC1-7): G01L23/10; G01L9/08
Attorney, Agent or Firm:
Kazuhiko Hirose