Title:
【発明の名称】投影露光装置
Document Type and Number:
Japanese Patent JP3380868
Kind Code:
B2
Inventors:
Yoshitada Oshida
Susumu Tawa
Yukihiro Shibata
Shigemi Ishii
Minoru Noguchi
Tsuneo Terasawa
Makoto Murayama
Susumu Tawa
Yukihiro Shibata
Shigemi Ishii
Minoru Noguchi
Tsuneo Terasawa
Makoto Murayama
Application Number:
JP1867692A
Publication Date:
February 24, 2003
Filing Date:
February 04, 1992
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
G02B6/00; G02B27/18; H01L21/027; H01L21/30; (IPC1-7): H01L21/027; G02B6/00; G02B27/18
Domestic Patent References:
| JP4101148A | ||||
| JP4225357A | ||||
| JP3114218A | ||||
| JP6477124A | ||||
| JP6191662A |
Attorney, Agent or Firm:
Yasuo Sakuta