Title:
【発明の名称】焦電型赤外線固体撮像装置
Document Type and Number:
Japanese Patent JP2523895
Kind Code:
B2
Abstract:
PURPOSE:To improve infrared ray absorption rate and also to make it highly efficient and highly sensitive by putting an infrared ray absorbing film, which constitutes an image pickup device, in at least two layers, and constituting the lower layer mainly of SiO2 and the uppermost layer mainly of polyimide. CONSTITUTION:The surface and the rear of a pyroelectric film 3 are coated with electrodes 4 and 5, and on the electrode 5 provided at the surface, a layer 1 about 2mum in thickness mainly composed of SiO2 is formed by sputtering method, etc. Next, on this, an organic film 2 having approximately the same thickness is provided. In obtaining the film 2, for example, photosensitive polyimide is applied on the whole face by spin coating, and it is exposed and developed by ultraviolet rays, and often sputtering, it is heat-treated. Moreover, the collecting film 3 is several mum in thickness, and is constituted of PbTiO3, Pb1-xLaxTi1-x/4O3, or the like, and the temperature change by the absorption of infrared rays is converted into an electric signal so as to make it do the action of an infrared ray sensor. The electrode 5 is constituted of NiCr approximately 200Angstrom in thickness, and the electrode 4 is constituted of Pt approximately 1000Angstrom in thickness, or the like.
Inventors:
ASAYAMA JUNKO
TOMITA YOSHIHIRO
NOMURA KOJI
TAKAYAMA RYOICHI
OGAWA KUNI
TOMITA YOSHIHIRO
NOMURA KOJI
TAKAYAMA RYOICHI
OGAWA KUNI
Application Number:
JP24562389A
Publication Date:
August 14, 1996
Filing Date:
September 21, 1989
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
H04N5/33; G01J1/02; G01J5/02; G01J5/34; H01L27/14; H01L37/02; (IPC1-7): H01L27/14; G01J1/02; G01J5/02; H01L37/02
Domestic Patent References:
| JP60180180A | ||||
| JP6354764A |
Attorney, Agent or Firm:
Tomoyuki Takimoto