Title:
【発明の名称】レジスト処理装置
Document Type and Number:
Japanese Patent JP2726281
Kind Code:
B2
Inventors:
HIRASAWA MASAKATSU
Application Number:
JP24614888A
Publication Date:
March 11, 1998
Filing Date:
September 30, 1988
Export Citation:
Assignee:
TOKYO EREKUTORON KK
International Classes:
B05C11/08; B05D1/00; B05D3/00; G03F7/16; H01L21/027; H01L21/30; (IPC1-7): H01L21/027; G03F7/16
Domestic Patent References:
| JP62206830A | ||||
| JP6058266A | ||||
| JP61245527A | ||||
| JP61268311A | ||||
| JP62211920A | ||||
| JP5886210U |
Attorney, Agent or Firm:
Moriya Kazuo