【発明の名称】レジスト剥離液

Title:

【発明の名称】レジスト剥離液

Document Type and Number:

Japanese Patent JP2829341

Kind Code:

B2

Inventors:

TANAKA HARUYORI
KAWAI YOSHIO
BAN KOJI

Application Number:

JP130690A

Publication Date:

November 25, 1998

Filing Date:

January 08, 1990

Export Citation:

Assignee:

NIPPON DENSHIN DENWA KK

International Classes:

C09D9/00; C09D9/04; C09D11/02; C09D11/023; C09D11/033; G03F7/42; H01L21/027; (IPC1-7): C09D9/04; H01L21/027

Domestic Patent References:

Attorney, Agent or Firm:

Masatake Shiga

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