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Title:
THEREOF SEMICONDUCTOR LASER ELEMENT AND MANUFACTURE
Document Type and Number:
Japanese Patent JPH0722689
Kind Code:
A
Abstract:

PURPOSE: To obtain a surface light emitting laser element having the vertical resonator structure by using a semiconductor laser element manufacturing technique of the conventional level resonator structure.

CONSTITUTION: After forming a high reflection insulating film 1 on an n-type GaAs substrate, crystallization growth of an n-type GaAs layer 17 is performed on the n-type GaAs substrate in the vertical direction while having high reflection insulating film 16 as a selective growth mask. An n-type AlGaAs clad layer, an AlGaAs active layer 18, a p-type AlGaAs clad layer, a p-type GaAs contact layer 19 are made to perform crystallization growth in order on both sides of the n-type GaAs layer 17 in the vertical direction, a low reflection insulating film 20 is formed thereon, a p-side electrode 21, an n-type electrode 22 are formed so as to complete a surface light emitting laser element. Thereby, the surface light emitting laser element of the vertical resonation structure can be obtained by using a semiconductor laser element manufacturing technique of the conventional level resonator structure.


Inventors:
MIURA TAKESHI
KUNITSUGU YASUHIRO
Application Number:
JP15882293A
Publication Date:
January 24, 1995
Filing Date:
June 29, 1993
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H01S5/00; H01S5/026; (IPC1-7): H01S3/18
Attorney, Agent or Firm:
Takada Mamoru