PURPOSE: To dry metallic parts in a short time and to prevent the environment and human body from being adversely affected by placing the cleaned parts in a vessel, supplying a high-frequency current to a heating coil while rotating the vessel and drying off the cleaner.

CONSTITUTION: A vessel 8 formed with a non-conductive material is set in a cleaning part 2, and metallic parts 7 to be cleaned are placed in the vessel. A cleaning soln. 16 except the fluorocarbon and chlorine cleaners is injected to clean the parts. The cleaning soln. is discharged, and then the vessel 8 is set on a rotary disk 6 in a drying part 1. The disk 6 is rotated, a high-frequency current is supplied to a heating coil 10, and the parts 7 are heated by the current. Since the vessel 8 is rotated, the parts 7 are uniformly heated, and the cleaning soln. is dried off.