Title:
【発明の名称】走査型プローブ顕微鏡
Document Type and Number:
Japanese Patent JP2952327
Kind Code:
B2
Abstract:
A scanning probe microscope for scanning a probe needle in proximity to a surface of a sample in XY-axis directions while moving at least one of the probe and the sample in a Z-axis direction has a plurality of band-pass filters for passing a plurality of band-pass signals by extracting predetermined frequency bands different one another from a surface geometry signal output by a probe. An image memory stores the respective band-pass signals and corresponding positions on the sample surface, and a color image outputting device outputs a color image by treating each of the respective band-pass signals stored as image data in the image memory as different color data and combining the data. The plurality of band-pass signals includes a first band-pass signal having a first frequency range set to include only abrupt transitions in the sample surface and a second band-pass signal having a second frequency range set to include frequencies slightly outside the first frequency range so that abrupt transitions in geometry on the sample surface are represented by a first color in response to the first band-pass signal and areas directly adjacent the abrupt transitions on the sample surface are represented by a second color different from the first color.
Inventors:
HONMA AKIHIKO
UMEKI TAKESHI
INOE AKIRA
UMEKI TAKESHI
INOE AKIRA
Application Number:
JP19185998A
Publication Date:
September 27, 1999
Filing Date:
July 07, 1998
Export Citation:
Assignee:
SEIKOO INSUTSURUMENTSU KK
International Classes:
G01B21/30; G01N37/00; G01Q10/04; G01Q30/04; G01Q90/00; G06T1/00; (IPC1-7): G06T1/00; G01B21/30; G01N37/00
Domestic Patent References:
| JP8221817A | ||||
| JP5882156A |
Attorney, Agent or Firm:
Keinosuke Hayashi