Title:
【発明の名称】半導体センサ
Document Type and Number:
Japanese Patent JP2836846
Kind Code:
B2
Inventors:
HASHIMOTO HIDEKI
TAKEBE KATSUHIKO
TAKEBE KATSUHIKO
Application Number:
JP14575289A
Publication Date:
December 14, 1998
Filing Date:
June 08, 1989
Export Citation:
Assignee:
HONDA GIKEN KOGYO KK
International Classes:
G01P15/12; G01L1/18; G01P15/08; H01L29/80; H01L29/84; (IPC1-7): G01L1/18; G01P15/08; H01L29/84
Domestic Patent References:
| JP52134481A | ||||
| JP58105020A |
Attorney, Agent or Firm:
Michito Hiraki (1 person outside)