【発明の名称】半導体製造装置 - 東京エレクトロン株式会社

Title:

【発明の名称】半導体製造装置

Document Type and Number:

Japanese Patent JP2668020

Kind Code:

B2

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Inventors:

Nakao Ken

Application Number:

JP22306088A

Publication Date:

October 27, 1997

Filing Date:

September 06, 1988

Export Citation:

Assignee:

東京エレクトロン株式会社

International Classes:

C23C16/44; H01L21/205; H01L21/22; H01L21/31; H01L21/316; (IPC1-7): H01L21/22; C23C16/44; H01L21/205; H01L21/31; H01L21/316

Domestic Patent References:

Attorney, Agent or Firm:

Saichi Suyama (1 person outside)

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