Title:
【発明の名称】半導体製造装置
Document Type and Number:
Japanese Patent JP3347794
Kind Code:
B2
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| JP3533555 | CUT VALVE |
Inventors:
Shuji Kitajima
Fumio Muramatsu
Tomohiko Takeda
Fumio Muramatsu
Tomohiko Takeda
Application Number:
JP2856393A
Publication Date:
November 20, 2002
Filing Date:
January 25, 1993
Export Citation:
Assignee:
Hitachi Kokusai Electric Co., Ltd.
International Classes:
F16K24/04; B01J3/02; F04D9/04; F16K51/02; H01L21/02; (IPC1-7): H01L21/02; B01J3/02; F04D9/04; F16K24/04; F16K51/02
Domestic Patent References:
| JP3116413U | ||||
| JP245136U |
Attorney, Agent or Firm:
Shoji Miyoshi