Title:
【発明の名称】半導体式圧力センサ
Document Type and Number:
Japanese Patent JP2671604
Kind Code:
B2
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Inventors:
Yamashita Anyo
Application Number:
JP51298494A
Publication Date:
October 29, 1997
Filing Date:
December 06, 1993
Export Citation:
Assignee:
株式会社デンソー
International Classes:
G01L7/08; G01L9/04; (IPC1-7): G01L9/04; G01L7/08
Attorney, Agent or Firm:
Hirohiko Usui