PURPOSE: To contrive the improvement of element characteristics and the reduction of manufacturing cost by a method wherein an electrode on an element region is electrically connected to a substrate supporter, which is then utilized as an arbitrary lead-out electrode terminal.
CONSTITUTION: The semiconductor substrate 31 is loaded on the substrate supporter 30 in the state of electrical connection, and the element region 33 and a diode forming region 34 surrounded with an element isolation region 32 are provided. A base electrode 36 and an emitter electrode 38 are provided on the element region 33, and the regions 33 and 34 are electrically connected via external wiring 39. Besides, the electrodes 36 and 38 are provided with electrode lead-out terminals 43 and 44 connected to each, and the supporter 30 is provided with an output lead-out terminal 45 successively connected to a region 42, a wiring 41, a diode, an external wiring 39, and the collector of the region 33.
MITANI TATSUROU
UCHIUMI TAKAYOSHI
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