Title:
【発明の名称】ステージ装置
Document Type and Number:
Japanese Patent JP2879934
Kind Code:
B2
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Inventors:
TOMITA YOSHUKI
SATO FUMIAKI
ITO KAZUHIRO
SATO FUMIAKI
ITO KAZUHIRO
Application Number:
JP11461290A
Publication Date:
April 05, 1999
Filing Date:
April 27, 1990
Export Citation:
Assignee:
SUMITOMO JUKIKAI KOGYO KK
International Classes:
F16C32/04; H01L21/00; H02K41/03; (IPC1-7): H02K41/03; F16C32/04; H01L21/00
Domestic Patent References:
| JP5254108A | ||||
| JP3178746A | ||||
| JP3178747A |
Attorney, Agent or Firm:
Keishiro Takahashi