Title:
【発明の名称】縞走査型干渉測定装置
Document Type and Number:
Japanese Patent JP2891715
Kind Code:
B2
Inventors:
NISHIMOTO YOSHIBUMI
OOTSUKA MASARU
HANEYA SATOSHI
OOTSUKA MASARU
HANEYA SATOSHI
Application Number:
JP8234289A
Publication Date:
May 17, 1999
Filing Date:
March 31, 1989
Export Citation:
Assignee:
KYANON KK
International Classes:
G01B9/02; G01B11/24; (IPC1-7): G01B11/24; G01B9/02
Domestic Patent References:
| JP63241305A | ||||
| JP59154309A | ||||
| JP57153206A |
Attorney, Agent or Firm:
Kato Kazuo