Title:
【発明の名称】基板分割装置
Document Type and Number:
Japanese Patent JP2823375
Kind Code:
B2
Inventors:
Shogo Tani
Satozo Kato
Satozo Kato
Application Number:
JP6249291A
Publication Date:
November 11, 1998
Filing Date:
March 05, 1991
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
B21D28/00; B21D28/04; B21D28/06; H05K3/00; (IPC1-7): H05K3/00
Domestic Patent References:
| JP372690A | ||||
| JP2127930A |
Attorney, Agent or Firm:
Kenjiro Take