Title:
【発明の名称】基板搬送装置
Document Type and Number:
Japanese Patent JP2982142
Kind Code:
B2
Inventors:
TORIGOE SOZO
Application Number:
JP34081993A
Publication Date:
November 22, 1999
Filing Date:
December 09, 1993
Export Citation:
Assignee:
KAIJOO KK
International Classes:
B65G25/04; H01L21/50; (IPC1-7): B65G25/04
Domestic Patent References:
| JP2121340A | ||||
| JP59181542A | ||||
| JP6067308A | ||||
| JP360132A |
Attorney, Agent or Firm:
Shoji Hagiri