【発明の名称】基板加熱装置

Title:

【発明の名称】基板加熱装置

Document Type and Number:

Japanese Patent JP2889935

Kind Code:

B2

Inventors:

GOTO KAZUYUKI
YOSHINAGA TAKASHI
AKUMOTO MASAMI
FURUKAWA TAKAHIRO

Application Number:

JP27268890A

Publication Date:

May 10, 1999

Filing Date:

October 11, 1990

Export Citation:

Assignee:

TOKYO EREKUTORON KK

International Classes:

G03F7/26; H01L21/027; H01L21/30; H01L21/324; (IPC1-7): H01L21/027; G03F7/26; H01L21/324

Domestic Patent References:

JP1241124A
JP58206123A

Attorney, Agent or Firm:

Saichi Suyama (1 person outside)

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