Title:
【発明の名称】基板の研磨平削りモジューラ機
Document Type and Number:
Japanese Patent JP2002509812
Kind Code:
A
Abstract:
The invention concerns a polishing machine comprising at least a base unit (10) in the form of a parallelepiped cell (12), with a first loading and unloading surface (14), a second opposite parallel surface (16) for access to the working zone located in an intermediate section (24), and third and fourth surfaces (18, 20). The loading pallet board (48) and unloading pallet board (56) are respectively borne by a loading arm (50) and an unloading arm (58) operating independently of each other, said pallet boards being both accessible on the first surface (14) side. The mechanism (28, 30) is located in the lower section beneath the cell (12) intermediate section (24), while the automaton is arranged in the top section, the mechanism and the automaton being accessible on the second surface (16) side.
Inventors:
Marc, Peltier
Lucian, Grisel
Lucian, Grisel
Application Number:
JP2000540971A
Publication Date:
April 02, 2002
Filing Date:
March 30, 1999
Export Citation:
Assignee:
Steag, Electronic, Distems, Gezel Shaft, Mitt, Beschlenktel, Haftung
International Classes:
B23Q39/04; B24B37/27; B24B37/34; B24B41/02; B24B53/007; B24B37/04; B24B53/017; H01L21/304; (IPC1-7): B24B37/04; B24B53/007; H01L21/304
Attorney, Agent or Firm:
Kazuo Sato (3 others)