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Title:
【発明の名称】基板処理装置
Document Type and Number:
Japanese Patent JP3102824
Kind Code:
B2
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Inventors:
Yuusuke Muraoka
Application Number:
JP13124693A
Publication Date:
October 23, 2000
Filing Date:
May 07, 1993
Export Citation:
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Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
H01L21/31; C23C16/44; H01L21/677; H01L21/68; (IPC1-7): H01L21/31; C23C16/44; H01L21/68
Domestic Patent References:
JP52139378A
JP5599739A



 
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