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Patent Searching and Data


Title:
SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPS5922361
Kind Code:
A
Abstract:

PURPOSE: To enable a complete ohmic contact between polycrystalline silicon and a conductive transparent electrode by holding a thin-film in indium, tin or an indium-tin alloy similar to the conductive transparent electrode between them.

CONSTITUTION: A contact hole is bored to a silicon oxide film 14 on a drain region formed while coating the surface of a polycrystalline silicon thin-film 13, and a drain electrode extracting window is formed. The indium-tin thin-film in approximately 10∼100 is sputtered by using a target in the indium-tin alloy, and an indium oxide film containing tin oxide is sputtered continuously in approximately 1,000. An electrode for driving a liquid crystal of a desired pattern is obtained through photolithography technique. The polycrystalline silicon 13 of the drain region is in contact with the transparent electrode 16 through the indium-tin thin-film 15 at that time. The polycrystalline silicon 13 and the transparent electrode 16 are brought to a complete ohmic conductive state through the indium-tin thin-film by heating the whole at 200∼500°C. Lastly, the liquid crystal is oriented to the whole surface of a glass plate 12, and one panel board of a liquid crystal display unit is completed.


Inventors:
YAMADA TAKEO
Application Number:
JP13139282A
Publication Date:
February 04, 1984
Filing Date:
July 28, 1982
Export Citation:
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Assignee:
SUWA SEIKOSHA KK
International Classes:
H01L27/12; G02F1/1343; G02F1/136; G02F1/1368; G03G21/04; H01L29/40; H01L29/45; H01L29/78; H01L29/786; (IPC1-7): G09F9/30; H01L27/12
Attorney, Agent or Firm:
Kisaburo Suzuki (1 outside)