Title:
【発明の名称】表面分析装置
Document Type and Number:
Japanese Patent JP3361735
Kind Code:
B2
Abstract:
It is so adapted that a sample is mounted on three-dimensional stages through a sample holder and a beam light emitted from a beam light oscillator is applied to a sample surface through a polarizing element different from polarization of the beam light or directly. An image of a foreign-matter on the sample surface scattered by the beam light is displayed on a monitor through a polarizing element different from the beam light, through a CCD camera mounted on an optical microscope. As a method of bringing the beam light until it is applied to the sample surface, there are a method of using an optical fiber for the beam light and a method of using an optical part such as a mirror.
Inventors:
Shigeru Wakiyama
Naohiko Fujino
Naohiko Fujino
Application Number:
JP33006497A
Publication Date:
January 07, 2003
Filing Date:
December 01, 1997
Export Citation:
Assignee:
Seiko Instruments Inc.
Mitsubishi Electric Corporation
Mitsubishi Electric Corporation
International Classes:
G01N21/88; G01N21/93; G01N21/94; G01N21/956; G01N23/00; G01N37/00; G01Q10/00; G01Q10/02; G01Q30/00; G01Q30/02; G01Q60/24; G01Q60/50; G01Q70/10; G02B21/00; G21K7/00; H01J3/14; H01J5/16; H01J37/00; H01J40/14; G01Q60/00; (IPC1-7): G01N13/10; G01N13/16; G02B21/00; G12B21/20
Domestic Patent References:
| JP829354A | ||||
| JP3110454A | ||||
| JP636854A | ||||
| JP10170522A | ||||
| JP7174768A | ||||
| JP786465B2 |
Other References:
藤野直彦、狩野勇、倉本一雄、小林淳二、脇山茂、大森雅司，“シリコン結晶起因表面欠陥の原子間力顕微鏡観察と生成機構”，応用物理，日本，応用物理学会，１９９７年７月１０日，第６６巻、第７号，ｐ．７３２−７３４
藤野直彦、脇山茂，”位置決め機能付き原子間力顕微鏡の開発”，ぶんせき，日本，社団法人日本分析化学会，１９９７年５月５日，第５号，ｐ．４０９−４１３
藤野直彦、脇山茂、大森雅司，“位置決め機能付き原子間力顕微鏡を用いた洗浄評価技術”，超音波ＴＥＣＨＮＯ，日本，１９９７年１１月１５日，第９巻、第１１号，ｐ．３８−４３
藤野直彦、脇山茂，”位置決め機能付き原子間力顕微鏡の開発”，ぶんせき，日本，社団法人日本分析化学会，１９９７年５月５日，第５号，ｐ．４０９−４１３
藤野直彦、脇山茂、大森雅司，“位置決め機能付き原子間力顕微鏡を用いた洗浄評価技術”，超音波ＴＥＣＨＮＯ，日本，１９９７年１１月１５日，第９巻、第１１号，ｐ．３８−４３
Attorney, Agent or Firm:
Masaaki Sakaue