Title:
【発明の名称】薄膜形成装置のターゲット保持機構
Document Type and Number:
Japanese Patent JP3017437
Kind Code:
B2
Inventors:
Tadahiro Ohmi
Naoshi Shibata
Yu Umeda
Naoshi Shibata
Yu Umeda
Application Number:
JP33794895A
Publication Date:
March 06, 2000
Filing Date:
November 30, 1995
Export Citation:
Assignee:
Tadahiro Ohmi
International Classes:
C23C14/34; H01L21/203; H01L21/285; H01L21/31; H01L21/3205; (IPC1-7): H01L21/31; C23C14/34; H01L21/203
Domestic Patent References:
| JP59215485A | ||||
| JP63123668U |
Attorney, Agent or Firm:
Hisao Fukumori