Title:
【発明の名称】スパッタリング用ターゲット
Document Type and Number:
Japanese Patent JP3040432
Kind Code:
B2
Inventors:
Akira Ohba
Masanori Maenosono
Youichi Koga
Masanori Maenosono
Youichi Koga
Application Number:
JP14588090A
Publication Date:
May 15, 2000
Filing Date:
June 04, 1990
Export Citation:
Assignee:
Vacuum Metallurgy Co., Ltd.
International Classes:
C23C14/34; (IPC1-7): C23C14/34
Domestic Patent References:
| JP1139761A | ||||
| JP57129773U |
Attorney, Agent or Firm:
Yasuo Iisaka