PULLING UP DEVICE FOR SILICON SINGLE CRYSTAL

Title:

PULLING UP DEVICE FOR SILICON SINGLE CRYSTAL

Document Type and Number:

Japanese Patent JPH0648884

Kind Code:

A

Abstract:

PURPOSE: To increase the temp. gradient in a pulling up direction by installing a top ring consisting of a horizontal disk-shaped torus and a pendent cylinder provided on the inner periphery of this torus above a heater of the pulling up device.

CONSTITUTION: The top ring 10 consisting of the horizontal disk-shaped torus 11 and the pendent cylinder 12 provided like eaves on the inner periphery of this torus 11 is provided above the heater of the pulling up device by a Czochralski method to shield the heat radiation from the heater to the single crystal.

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Inventors:

SEKI YASUYUKI
NISHIZAKI KATSUMI
ECHIZENYA KAZUHIKO
KANEDA HIROSHI

Application Number:

JP20210192A

Publication Date:

February 22, 1994

Filing Date:

July 29, 1992

Export Citation:

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Assignee:

KAWASAKI STEEL CO

International Classes:

C30B15/00; C30B15/14; C30B29/06; (IPC1-7): C30B15/00; C30B15/14; C30B29/06

Attorney, Agent or Firm:

Yoshio Kosugi (1 person outside)

Next Patent: PRODUCTION DEVICE FOR SINGLE CRYSTAL