Title:
【発明の名称】工具、この工具の製法及び製造装置及びこの工具の使用
Document Type and Number:
Japanese Patent JPH10500451
Kind Code:
A
Abstract:
PCT No. PCT/DE95/00449 Sec. 371 Date Sep. 27, 1996 Sec. 102(e) Date Sep. 27, 1996 PCT Filed Apr. 1, 1995 PCT Pub. No. WO95/32317 PCT Pub. Date Nov. 30, 1995A tool is made in a coating vessel, depositing upon the base tool body of a hard metal or cermet, a coating by chemical vapor deposition by admitting to the vessel a reactive gas mixture capable of forming a composition selected from the group which consists of aluminum oxide and of titanium and zirconium carbide, nitride and carbonitride, and of mixtures thereof at a chemical vapor deposition pressure and temperature; and interrupting the chemical vapor deposition by a multiplicity of times by replacing the reactive gas mixture with a nonreactive gas mixture containing components selected from the group which consists of argon, hydrogen, nitrogen and mixtures thereof, lowering a pressure in the vessel to a plasma chemical vapor deposition pressure of 10 to 1000 Pa, effecting a glow discharge at the body with the body being cathodically connected at a negative D.C. voltage of 200 to 1000 volts for a period of 1 to 30 minutes, to effect plasma chemical vapor deposition coating between chemical vapor deposition coating with the reactive mixture.
Inventors:
Aud koenig
Application Number:
JP52997095A
Publication Date:
January 13, 1998
Filing Date:
April 01, 1995
Export Citation:
Assignee:
Vidia Gezel Shaft Mitt Beschlenktel Haftung
International Classes:
C23C16/30; C23C16/36; C23C16/44; B23B27/14; C23C16/52; C23C16/56; C23C30/00; (IPC1-7): C23C16/30; C23C16/52
Attorney, Agent or Firm:
Toshio Yano (3 outside)