PURPOSE: To firmly fix a support projection to a wafer transfer fork so as not to fall off by a method wherein the support projection is fastened to the transfer fork as it is screwed in a threaded hole provided to the wafer transfer fork cutting thread grooves in its peripheral surface.

CONSTITUTION: Support projections 5 of resin are provided to the upsides of the forked tips and the root of a wafer transfer fork 1, and a wafer is placed on the support projections 5. Threaded holes 7 whose diameter d is smaller than 1 that D of the support projection 5 are provided, and adhesive agent 8 is applied to the thread grooves of the threaded holes 7. When the support projection 5 is screwed in the threaded hole 7 conforming to the other projections in height, thread grooves are cut in the peripheral surface of the support projection 5 by the thread grooves of the threaded hole 7. Therefore, adhesive agent 8 is filled in the thread grooves of the threaded hole 7 and the support projection 5 to firmly fix the projection 5 to the threaded hole 7. Forcibly fed adhesive agent 8 is made to flow out to the end of the threaded hole 7 and the end face of the support projection 5 to bond them together.