Title:
【発明の名称】トンネルトランジスタ
Document Type and Number:
Japanese Patent JP2800675
Kind Code:
B2
Inventors:
Toshio Baba
Uemura Tetsuya
Uemura Tetsuya
Application Number:
JP5347094A
Publication Date:
September 21, 1998
Filing Date:
March 24, 1994
Export Citation:
Assignee:
NEC
International Classes:
H01L29/78; H01L29/80; (IPC1-7): H01L29/80
Attorney, Agent or Firm:
Yoshiyuki Iwasa