Title:
【発明の名称】ターボ分子ポンプ及び真空装置
Document Type and Number:
Japanese Patent JP3047292
Kind Code:
B1
Abstract:
An object of the present invention is to provide a turbomolecular pump capable of maintaining a maximum discharge rate even in a higher pressure. Blades (63) of a rotor blade (62) and blades (75) of a stator blade (72) at each stage are respectively shaped so that the performance in a range from the elevation angle emphasizing the amount of sucking gas to the elevation angle emphasizing the capability of preventing the reverse flow can be exerted in the blades at one stage. More specifically, the elevation angle of alpha 1 on the inlet port side on blade surfaces (C, D) facing the outlet port is set to a range between 20 and 50 degrees. Assuming the elevation angle alpha 1 = L on the inlet port side, while the elevation angle of alpha 2 on the outlet port side is set to a range between 10 and (L - 5) degrees. It is so constructed that both effect to secure the amount of sucking gas and to prevent the reverse flow at their own stage can be realized in the blades at each stage, whereby a maximum discharge rate can be maintained even in a higher pressure.
Inventors:
Manabu Nonaka
Takashi Okada
Takeshi Kabasawa
Takashi Okada
Takeshi Kabasawa
Application Number:
JP34938298A
Publication Date:
May 29, 2000
Filing Date:
November 24, 1998
Export Citation:
Assignee:
Seiko Seiki Co., Ltd.
International Classes:
F04D19/04; F04D29/32; F04D29/38; F04D29/54; (IPC1-7): F04D19/04
Domestic Patent References:
| JP6125993A | ||||
| JP57191492A |
Attorney, Agent or Firm:
Takashi Kawai (1 person outside)
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