Title:
【発明の名称】2軸平面鏡干渉計
Document Type and Number:
Japanese Patent JPH05504833
Kind Code:
A
Inventors:
Kendal, Rodney, Arthur
Application Number:
JP51557290A
Publication Date:
July 22, 1993
Filing Date:
October 12, 1990
Export Citation:
Assignee:
International Business Machines Corporation
International Classes:
G01B9/02; (IPC1-7): G01B9/02
Foreign References:
| US4883357A | 1989-11-28 |
Attorney, Agent or Firm:
Kiyoshi Goda (4 outside)